photolithographic fabrication
11electronics — /i lek tron iks, ee lek /, n. (used with a sing. v.) the science dealing with the development and application of devices and systems involving the flow of electrons in a vacuum, in gaseous media, and in semiconductors. [1905 10; see ELECTRONIC,… …
12Molecular electronics — For quantum mechanical study of the electron distribution in a molecule, see stereoelectronics. Molecular electronics, sometimes called moletronics, involves the study and application of molecular building blocks for the fabrication of electronic …
13Dry etching — refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes… …
14Mask set — A mask set is a series of electronic data that define geometry for the photolithography steps of semiconductor fabrication. Each of the physical masks generated from this data is called a photomask. A mask set for a modern process typically… …
15radiation — radiational, adj. /ray dee ay sheuhn/, n. 1. Physics. a. the process in which energy is emitted as particles or waves. b. the complete process in which energy is emitted by one body, transmitted through an intervening medium or space, and… …
16Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of …
17Alignment — is the adjustment of an object in relation with other objects, or a static orientation of some object or set of objects in relation to others. * An alignment of megaliths: see stone row. * An alignment (archaeology) in archaeology is a secondary… …
18Integrated circuit layout — Integrated circuit layout, also known IC layout, IC mask layout, or mask design, is the representation of an integrated circuit in terms of planar geometric shapes which correspond to the patterns of metal, oxide, or semiconductor layers that… …
19University of Teesside — Infobox University name = University of Teesside motto = Facta Non Verba ( Deeds Not Words ) established = 1930 (gained university status 1992) type = Public endowment = £85 million [ [http://www.tees.ac.uk/docs/DocRepo/Governors… …
20Stepper — A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Steppers are an essential part of the complex process, called photolithography, that creates… …
