line-edge roughness
1Roughness — is a measure of the texture of a surface. It is quantified by the vertical deviations of a real surface from its ideal form. If these deviations are large, the surface is rough; if they are small the surface is smooth. Roughness is typically… …
2edge — Synonyms and related words: A, acerbity, acidity, acidulousness, acme, acridity, acrimony, acuity, aculeate, acuminate, acumination, acuteness, adjoin, advantage, air line, allowance, alpha, anxious, apex, apogee, apprehensive, asperity,… …
3Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… …
4Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of …
5Photoresist — A photoresist is a light sensitive material used in several industrial processes, such as photolithography and photoengraving to form a patterned coating on a surface. Contents 1 Photoresist categories 1.1 Tone 1.2 Developing light wavelength …
6Photomask — A photomask. A schematic illustration of a photomask (top) …
7LER — may refer to:* Ler books, a loosely connected trilogy about an offshoot of humanity called the Ler by M. A. Foster *Ler, Norway, a village in the municipality of Melhus, Norway *Let em Roll, a pricing game from The Price is Right * Leytonstone… …
8Double patterning — is a class of technologies developed for photolithography to enhance the feature density. For the semiconductor industry, double patterning is the only lithography technique to be used for the 32 nm and 22 nm half pitch nodes in 2008 2009 and… …
9Nanolithography — Part of a series of articles on Nanoelectronics Single molecule electronics …
10Road — This article is about a route, thoroughfare or way that supports travel by a means of conveyance. For a place outside a harbor where a ship can lie at anchor, see Roadstead. For public roads, see Highway. For other routes, see thoroughfare. For… …
