etch-pit dislocation
1Etch pit density — The etch pit density (EPD) is a measure for the quality of semiconductor wafers. An etch solution is applied on the surface of the wafer where the etch rate is increased at dislocations of the crystal resulting in pits. For GaAs one uses… …
2Dislocation — For the syntactic operation, see Dislocation (syntax). For the medical term, see Joint dislocation. In materials science, a dislocation is a crystallographic defect, or irregularity, within a crystal structure. The presence of dislocations… …
