mask-to-wafer alignment

mask-to-wafer alignment
совмещение фотошаблона с полупроводниковой пластиной

Англо-русский словарь технических терминов. 2005.

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  • Alignment — is the adjustment of an object in relation with other objects, or a static orientation of some object or set of objects in relation to others. * An alignment of megaliths: see stone row. * An alignment (archaeology) in archaeology is a secondary… …   Wikipedia

  • Mask Aligner — Stepper (links) und Mask Aligner (rechts) unter photochemisch unwirksamer Beleuchtung („Gelblicht“) Mask Aligner (dt. etwa Maskenpositionierer, Maskenausrichter) sind Vorrichtungen oder Geräte, die zur exakten Positionierung von Masken für die… …   Deutsch Wikipedia

  • Stepper — A stepper is a device used in the manufacture of integrated circuits (ICs) that is similar in operation to a slide projector or a photographic enlarger. Steppers are an essential part of the complex process, called photolithography, that creates… …   Wikipedia

  • Nerve guidance conduit — A nerve guidance conduit (also referred to as an artificial nerve conduit or artificial nerve graft, as opposed to an autograft) is an artificial means of guiding axonal regrowth to facilitate nerve regeneration and is one of several clinical… …   Wikipedia

  • Maskenpositionierung — Stepper (links:MA 6) und Mask Aligner (rechts: MJB3) unter photochemisch unwirksamer Belichtung („Gelblicht“) Mask Aligner (dt. etwa Maskenpositionierer, Maskenausrichter) sind Vorrichtungen oder Geräte, die zur exakten Positionierung von Masken… …   Deutsch Wikipedia

  • Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia

  • Chemical-mechanical planarization — Chemical Mechanical Polishing/Planarization is a process of smoothing surfaces with the combination of chemical and mechanical forces. It can be thought of as a hybrid of chemical etching and free abrasive polishing. Contents 1 Description 2… …   Wikipedia

  • materials science — the study of the characteristics and uses of various materials, as glass, plastics, and metals. [1960 65] * * * Study of the properties of solid materials and how those properties are determined by the material s composition and structure, both… …   Universalium

  • Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

  • Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of …   Wikipedia

  • nanotechnology — /nan euh tek nol euh jee, nay neuh /, n. any technology on the scale of nanometers. [1987] * * * Manipulation of atoms, molecules, and materials to form structures on the scale of nanometres (billionths of a metre). These nanostructures typically …   Universalium


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