E-beam [electron-beam] microfabrication


E-beam [electron-beam] microfabrication
электронно-лучевая микролитография

Англо-русский словарь технических терминов. 2005.

Смотреть что такое "E-beam [electron-beam] microfabrication" в других словарях:

  • Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

  • Electron beam induced deposition — (EBID) is a process of decomposing gaseous molecules by electron beam leading to deposition of non volatile fragments onto a nearby substrate. Process Focused electron beam of scanning electron microscope (SEM) or scanning transmission electron… …   Wikipedia

  • Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… …   Wikipedia

  • Electron — For other uses, see Electron (disambiguation). Electron Experiments with a Crookes tube first demonstrated the particle nature of electrons. In this illustration, the profile of the cross shaped target is projected against the tube face at right… …   Wikipedia

  • Électron — Traduction à relire Electron → …   Wikipédia en Français

  • Scanning Electron Microscopy — Microscopie électronique à balayage Pour les articles homonymes, voir MEB, SEM et Microscope. Microscope électronique à balayage JEOL JSM 6340F …   Wikipédia en Français

  • 3D microfabrication — relates to the engineering of bulk solids on the micrometre or submicrometre scale. Although the term nanofabrication might be considered for the submicrometre scale, it is not in common use, and tends to relate to a bottom up approach (while… …   Wikipedia

  • Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia

  • Dip-pen nanolithography — (DPN) began as a scanning probe lithography technique where an atomic force microscope tip was used to transfer alkane thiolates to a gold surface. This technique allows surface patterning on scales of under 100 nanometers. DPN is the… …   Wikipedia

  • Microscope électronique à balayage — Microscopie électronique à balayage Pour les articles homonymes, voir MEB, SEM et Microscope. Microscope électronique à balayage JEOL JSM 6340F …   Wikipédia en Français

  • Microscopie electronique a balayage — Microscopie électronique à balayage Pour les articles homonymes, voir MEB, SEM et Microscope. Microscope électronique à balayage JEOL JSM 6340F …   Wikipédia en Français


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