- dry ashing
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сухое озоление
Англо-русский словарь технических терминов. 2005.
dry ashing
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Dry etching — refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes… … Wikipedia
Semiconductor device fabrication — Semiconductor manufacturing processes 10 µm 1971 3 µm 1975 1.5 µm 1982 … Wikipedia
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Inductively Coupled Plasma Emission Spectrometry — Inductively Coupled Plasma Emission SpectrometryA test method of quantitative identification of the elements, Aluminium, Silicon, Sodium, Vanadium, Nickel, Iron, Calcium, Zinc and Phosphorus in residual fuel oils.A weighted test sample is… … Wikipedia
ash — 1. noun /æʃ/ a) The solid remains of a fire. The audience was more captivated by the growing ash at the end of his cigarette than by his words. b) The nonaqueous remains of a material subjected to any complete oxidation process. Ash from a… … Wiktionary
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Inductively coupled plasma atomic emission spectroscopy — (ICP AES), also referred to as inductively coupled plasma optical emission spectrometry (ICP OES), is an analytical technique used for the detection of trace metals. It is a type of emission spectroscopy that uses the inductively coupled plasma… … Wikipedia
Glasswort — The common name Glasswort came into use in the 16th Century to describe plants growing in England whose ashes could be used for making soda based (as opposed to potash based) glass. [ Definition of glasswort , Oxford English Dictionary, 2nd… … Wikipedia
sample preparation — ▪ chemistry Introduction in analytical chemistry (chemistry), the processes in which a representative piece of material is extracted from a larger amount and readied for analysis. Sampling and sample preparation have a unique meaning and special … Universalium
