- cylindrical plasma (etching )reactor
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цилиндрический [барабанный\] реактор (для плазменного травления)
Англо-русский словарь технических терминов. 2005.
Англо-русский словарь технических терминов. 2005.
Inductively coupled plasma — An inductively coupled plasma (ICP) is a type of plasma source in which the energy is supplied by electrical currents which are produced by electromagnetic induction, that is, by time varying magnetic fields. [A. Montaser and D. W. Golightly, eds … Wikipedia
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