- submicrometer MOS
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МОП-структура с субмикронными размерами элементов
Англо-русский словарь технических терминов. 2005.
Англо-русский словарь технических терминов. 2005.
Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… … Wikipedia