- pulsed-annealed silicon
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кремний, подвергнутый импульсному отжигу
Англо-русский словарь технических терминов. 2005.
Англо-русский словарь технических терминов. 2005.
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia