photoresist-processing technique

photoresist-processing technique
1) метод фотолитографии
2) технология фотолитографии

Англо-русский словарь технических терминов. 2005.

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  • Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… …   Wikipedia


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