photoresist grating

photoresist grating
фоторезистивная дифракционная решётка

Англо-русский словарь технических терминов. 2005.

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  • Nanoimprint lithography — is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint… …   Wikipedia


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