- quadrupole residual gas analyzer
- квадрупольный анализатор парциальных давлений газов
Большой англо-русский и русско-английский словарь. 2001.
quadrupole residual gas analyzer
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Residual gas analyzer — A residual gas analyzer (RGA) is a small and usually rugged mass spectrometer, typically designed for process control and contamination monitoring in the semiconductor industry. Utilizing quadrupole technology, there exists two implementations,… … Wikipedia
mass spectrometry — or mass spectroscopy Analytic technique by which chemical substances are identified by sorting gaseous ions by mass using electric and magnetic fields. A mass spectrometer uses electrical means to detect the sorted ions, while a mass spectrograph … Universalium
RFQ Beam Coolers — RFQ stands for Radio Frequency Quadrupole (also known as a Quadrupole mass analyzer when used as a mass filter), an instrument that is used in mass spectrometry. The RFQ was invented by Prof. Wolfgang Paul in the late 50 s / early 60 s at the… … Wikipedia
