- multiple-current generator
- многотоковый генератор
Большой англо-русский и русско-английский словарь. 2001.
multiple-current generator
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Multiple patterning — is a class of technologies developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of … Wikipedia
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