planarizing
1planarizing — noun The process of making something planar; flattening …
2Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… …
3planarization — noun The act or process of planarizing …